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Sustainability

Marvin Meyke,

PFAS-free polymer membranes for the semiconductor industry

PFAS chemicals are widely used in many industries due to their stability and resistance to water and grease. In the production of semiconductors, for example, membranes containing PFAS are used in various process steps. Researchers at the Fraunhofer Institute for Applied Polymer Research IAP have now developed a sustainable alternative in the form of a new type of PFAS-free membrane.

The PFAS-free polymer membrane is chemically stable, highly permeable and has a pore diameter of around seven nanometers. © Fraunhofer IAP

PFAS chemicals are toxic, they pollute water and soil and accumulate in humans and animals through food and consumer products. In February 2023, the European Chemicals Agency (ECHA) therefore published a proposal to ban the manufacture, use and placing on the market, including import, of PFAS in the European Economic Area. The semiconductor industry is critical of the impending PFAS ban: according to many manufacturers, there has been no alternative to the long-lasting perfluorinated and polyfluorinated chemicals to date, and the production of most semiconductor products would then no longer be possible.

Chemically stable with small pore diameter

Researchers at the Fraunhofer IAP in Potsdam have now succeeded in developing a PFAS-free membrane made from conventional, specifically stabilized polymers that can replace PFAS membranes for a supplier to the semiconductor industry. The membrane made from the polymer polyacrylonitrile (PAN) is characterized by high chemical and mechanical stability. It also has an extremely small pore diameter of around seven nanometers. This is necessary to separate particulate impurities from the production process and to filter and recycle the operating fluids required for the process, such as acids and solvents.

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"When chips are manufactured, countless process steps such as sawing, cleaning and planarization take place in order to apply the structures to the wafers. All of these operations generate particulate impurities that have to be separated during each process, otherwise they would damage the production of the nanometer-sized structures," explains Dr. Murat Tutus, engineer at the Fraunhofer IAP and head of the "Membranes and Functional Films" department. "We were able to chemically modify the polymer with another component that we patented and stabilize it for harsh process conditions," says the researcher.

Fields of application possible in various industries

As the membrane can be adjusted via the pore size and permeability, it can be easily adapted to different applications in other industries. The advantage of adapting a membrane is that existing systems can continue to be used and employees do not need to be trained. Dr. Tutus and his team see great potential for their developments, particularly in the pharmaceutical and chemical industries.

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