Sensors

Andreas Mühlbauer,

Precise 3D surface inspection and defect detection

Reflectcontrol sensors from Micro-Epsilon use phase-measuring deflectometry to precisely analyze reflective surfaces. A stripe pattern is projected onto the surface and its reflection is recorded by two cameras.

© Micro-Epsilon

The sensor calculates a 3D point cloud of the surface structure from the images, making irregularities, scratches and other defects visible. The sensor can be integrated stationary or guided over the measurement object on the robot. Localized deviations and defects are evaluated and displayed in the CAD data. The RCS130-160 3D HLP is specially optimized for measurement and inspection tasks in production lines and has a GigE Vision interface.

It therefore delivers GenICam-compliant data, enabling seamless integration into existing image processing systems. Thanks to the improved camera arrangement, the sensor delivers sharper 2D images than its predecessor model as well as a 3D representation of highly reflective surfaces. The high Z-resolution in the nanometer range and the excellent repeatability of <1 µm ensure that the sensor outputs up to 5 million 3D data points. Sensors from the Reflectconrol series can be used in semiconductor production, for example, where they detect the exact shape of a wafer. The sensors can also be used in conjunction with Micro-Epsilon's 3DInspect software.

Control, Hall 9, Stand 9301

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