Vacuum technology
Pfeiffer Vacuum presents new turbopumps
With the HiPace 350 and 450, Pfeiffer Vacuum is presenting turbopumps that are suitable for applications such as mass spectrometry, electron microscopy, metrology, particle accelerators and plasma physics.
Their wide range of applications includes analytics, vacuum process and semiconductor technology as well as applications in the fields of coating, research and development and industry.
HiPace 350 and 450 offer high performance with low weight and space requirements. With a hybrid bearing consisting of a ceramic ball bearing on the fore-vacuum side and a permanent-magnet radial bearing on the high vacuum side, the Pfeiffer Vacuum turbopumps in the HiPace series have a particularly robust bearing that ensures maximum reliability.
The new rotor design of the turbopumps results in a high pumping speed for light gases, extensive compatibility with backing pumps and high gas throughput as well as very good compression of light gases. It also ensures high cost efficiency and flexibility, as the pumps can be installed in any orientation. HiPace 350 and 450 are compact and powerful turbopumps in the 300 to 700 l/s pumping speed segment and have a high pumping speed for light gases.
The integrated HiPace drive electronics offer a variety of communication interfaces including ProfiNet and EtherCat without increasing the size. Remote and sensor functionalities enable the analysis of pump data for optimal process monitoring during operation. The pumps are certified to Semi S2, UL, CSA and Nema 12. Bearing maintenance and replacement can be carried out on site at the customer's premises. The pumps run maintenance-free for up to 5 years.
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