Ball screws
Positioning in an ultra-high vacuum
August Steinmeyer has developed ball screws for ultra-high vacuum applications.
These are used in a universal series of linear stages for a new type of imaging process with 30 nm resolution. This required several positioning systems for extreme standstill stability of 10 nm. A ball screw drive makes the positioning technology particularly stable and precise - and, depending on the design, also fast and durable. The systems were used at the Paul Scherrer Institute (PSI). The technology covers a wide range of applications from research and medical technology to semiconductor technology.
Special ball screw drive
A key component of the linear tables is a special ball screw drive, which enables dry travel at up to 50 mm/s and a service life of up to 5 km. When ultra-high vacuum lubricants are used, the achievable service life increases to several 100 km. At higher partial pressures of up to 10-6 mbar, distances of several 1,000 km can be achieved in a vacuum thanks to the better lubricants and more durable materials available for this range. With ceramic balls, a coating of the raceways, a special thread grinding process and an optimized deflection, good running properties of the ball screw can be achieved even without lubrication.
In addition to individual material selection and vacuum lubrication, the positioning system from Steinmeyer Mechatronik can be optionally equipped with a piezo caliper brake to ensure stability in the nanometer range despite high loads. In addition, adaptations to the installation situation in the chamber enable an individual customer hole pattern. Specific adapter parts and cable guides ensure a needs-based solution.
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