The gantry enables highly dynamic movements over an area of 1,000 x 800 mm (adapted to the task and the available storage space) with a repeat accuracy of 0.3 µm, thus guaranteeing high throughput with consistent quality.

µm-precise path travel and nanometer stability during measurement

In the horizontal XY plane, integrated linear motors ensure process speeds of 500 mm/s, while the AC servo achieves values of up to 200 mm/s on the vertical Z-axis. The customer-specific processing head or sensor on the Z-axis moves quickly and smoothly over the beams on the granite. The traverse is designed for loads of up to 10 kg, and the height can vary up to 500 mm depending on the application and component height. In order to achieve optimum running characteristics for extremely repeatable results in the sub-micrometer range, the profile rail guides are attached directly to the granite. This guarantees µm-precise path travel and nanometer stability during measurement.

Wide range of individual customization options

The positioning system is supplied complete with frame and coordinated vibration isolators, fully measured and commissioned, and with integrated safety technology in accordance with the Machinery Directive. The control system is individually adapted to the customer's control architecture; motion-synchronous triggering of the customer-specific measurement sensors is possible. The gantry design makes it easy to integrate into cycle lines and to add several such gantries.

The XYZ system meets the requirements for clean room class ISO 6 thanks to an additional cladding with integrated extraction or enclosure. In addition, further customer-specific adaptations can be made, including with regard to travel paths, length combinations, cabling and control. For the inspection of more complex geometries, a combination with lifting tables and/or rotary axes is possible.

Ideal basis for inspection systems in semiconductor or optics production

Thanks to its high precision and dynamics, long travel distances and compact design, the gantry system is an ideal basis for inspection systems in semiconductor or optics production. High-precision and dynamic applications in particular, such as laser joining and laser micro applications in medical technology, benefit from these properties.

As an established supplier of positioning systems for semiconductor inspection and semiconductor optics, Steinmeyer Mechatronik is also familiar with the requirements for ultraviolet and extreme ultraviolet processes and offers spacious assembly facilities for the complete commissioning of the system, including in the clean room.