In the semiconductor industry, structural miniaturization is leading to smaller, more efficient, faster and cheaper integrated circuits. Advances in microelectronics are increasing the demands on the handling systems that are responsible for the clean, safe transportation of wafers.

Photolithography is a key technology in the manufacture of microelectronic components and circuits as well as in the production of microsystems. To ensure the flawless production of wafers, designers take great care in programming the automated processes as well as monitoring the sequences. Many chip manufacturers work with their own suppliers in the area of handling systems. These companies can be involved in the production processes without too much risk and usually equip their designs with high-quality standard components for drives, controls and linear axes.

Secure linear axes

When it comes to securing linear axes with robust mechanical machine elements that are suitable for clean rooms, ACE shock absorbers have the right solutions. In addition to a wide range of catalog products, the company also offers customer-specific solutions. ACE's experienced team of engineers adapts these to the requirements of semiconductor manufacturers by precisely designing each component and then testing it in ACE's test laboratory. For chip production, high-precision, frictionless axes are installed in a handling system for the relevant application.

According to the manufacturer, their X and Y axes, as well as the center-pole axis (CP), may only be loaded with maximum permissible forces in the event of a crash to ensure that the system is not damaged. Accordingly, the three axes in this application had to be equipped with three different types from ACE's range of small shock absorbers. Four small shock absorbers with an M20 thread were used for the Y-axis, four for the X-axis, but with an M18 thread, and two for the CP-axis with an M25 thread size.

Suitable damper types

In the first step, the suitable damper types were determined according to the specifications provided by the customer and the maximum tolerated support force in the event of a crash was also specified. Based on this information, the developers at ACE simulated the drilling pattern for the small shock absorber type in question. This made it possible to decelerate energy and speed evenly over the entire stroke of 14 mm while reducing the maximum support force.

ACE was also able to meet the specified values for the best possible protection of the other two axles using mechanical components. In the final step, the miniature shock absorbers were delivered to the customer after extensive testing. Since then, the ten dampers have provided protection on all three movement axes of each handling system used in wafer production.

Hall 1, Stand 1311