Semiconductor manufacturing

Mobile for chips

Small, smart computer chips, so-called semiconductors, can now be found everywhere in everyday life. In semiconductor production, the chemical element silicon is processed in the form of wafers. During production, the wafers are stored and processed in special plastic cassettes under clean room conditions.

Kuka has developed a solution from a single source that can automatically transport and handle semiconductor cassettes. © Kuka

With the Wafer Handling Solution, Kuka has developed a solution from a single source that can automatically transport and handle semiconductor cassettes. The application consists of the KMR 200 CR mobile platform with Mecanum wheels, which enable omnidirectional movement in any direction. Sensors on the platform perceive the environment in real time and thus avoid collisions. The LBR iiwa, which is capable of human-robot collaboration, is installed on the platform. The robot's sensitivity makes it possible to handle the sensitive wafer cassettes safely and without vibration. The third component of the application is the customized gripper. The wafer handling software solution also comes from Kuka and is integrated into the semiconductor manufacturer's manufacturing execution system. The fleet manager integrated into the software controls the transport orders. as

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