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Multisensor computed tomography

Andreas Mühlbauer,

Sub-microfocus tube and high-voltage microfocus tube combined

A new device solution from Werth Messtechnik combines a sub-microfocus tube and a microfocus tube with a high voltage of up to 300 kV at a power of 80 W to form a two-tube measuring system.

Fiber structure of a filter (left) and penetration depth of particles (right, view from inside the workpiece onto the surface) with dimensions in the single-digit micrometer range. © Werth measurement technology

With focal spot sizes of just a few micrometers, even large or dense workpieces can be measured quickly and with high resolution. The device is also equipped with a chromatic focus point sensor for optical measurements.

The new sub-microfocus tube, with a voltage of 160 kV and a maximum power of 30 W, achieves a focal spot size of less than one micrometer by refocusing the electron beam. The achievable volume resolution is in the same order of magnitude. This makes it possible, for example, to measure the fiber structure of filter materials. The penetration depth of particles can also be measured and displayed in color-coded form with a view of the surface from inside the workpiece.

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