Mass spectrometer
Good sensitivity and wide dynamic range
With the HiQuad Neo mass spectrometer, Pfeiffer Vacuum combines high performance, flexibility and simple operation. The mass spectrometer achieves a measuring speed of up to 125 μs/u.
It is characterized by very good sensitivity and a large dynamic range. Depending on the application, different mass ranges, rod diameters, ion sources, detectors, interfaces and cable lengths can be selected. These features make the HiQuad Neo particularly suitable for applications in research and development, integration into analysis systems and cleanliness verification for EUV lithography. Previous generation devices can be upgraded to the latest HiQuad Neo. The use of some existing components, such as the analyzer, is possible.
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